Integration of HfO2-based 3D OxRAM with GAA stacked-nanosheet transistor for high-density embedded memory. - T. Dubreuil; Sylvain Barraud; J.-M. Pedini; Jean-Michel Hartmann; F. Boulard; A. Sarrazin; A. Gharbi; Johannes Sturm; A. Lambert; S. Martin; Niccolo Castellani; A. Anotta; et al. (ESSDERC, 2023)