Highly-Doped Through-Contact Silicon Epi Design at 3 nm node. - Sushant Mittal; Ashish Pal; Mehdi Saremi; J. Ferrell; M. Haverty; T. Miyashita; N. Kim; El Mehdi Bazizi; Blessy Alexander; A. B. Sachid; Buvna Ayyagari (DRC, 2019)