First Observation of Ultra-high Polarization ( 108 μC/cm²) in Nanometer Scaled High Performance Ferroelectric HZO Capacitors with Mo Electrodes. - F. Huang; B. Saini; L. Wan; H. Lu; X. He; S. Qin; Wilman Tsai; A. Gruverman; Andrew C. Meng; H.-S. Philip Wong; Paul C. McIntyre; Simon S. Wong (VLSI Technology and Circuits, 2023)