Demonstration of High-Growth-Rate Epitaxially Grown Si Channel on 3D NAND Test Vehicle with Memory Functionality. - Hao-Ling Tang; Insoo Jung; Frank CC Chin; Luc Thomas; Xin Meng; Arvind Kumar; Jaesoo Ahn; Zuoming Zhu; Abhishek Dube; Mahendra Pakala (IMW, 2024)