Characterisation of the Al2O3 films deposited by ultrasonic spray pyrolysis and atomic layer deposition methods for passivation of 4H-SiC devices. - Maciej Wolborski; Mietek Bakowski; Armando Ortiz; Viljami Pore; Adolf Schöner; Mikko Ritala; Markku Leskelä; Anders Hallén (Microelectron. Reliab., 2006)