Run-to-Run sensor variation monitoring for process fault diagnosis in semiconductor manufacturing. - Jakey Blue; Agnès Roussy; Jacques Pinaton (WSC, 2016)

Virtual Metrology Modeling based on Gaussian Bayesian Network. - Wei-Ting Yang; Jakey Blue; Agnès Roussy; Marco S. Reis; Jacques Pinaton (WSC, 2018)

A physics-informed Run-to-Run control framework for semiconductor manufacturing. - Wei-Ting Yang; Jakey Blue; Agnès Roussy; Jacques Pinaton; Marco S. Reis (Expert Syst. Appl., 2020)

A Structure Data-Driven Framework for Virtual Metrology Modeling. - Wei-Ting Yang; Jakey Blue; Agnès Roussy; Jacques Pinaton; Marco S. Reis (IEEE Trans Autom. Sci. Eng., 2020)

Virtual metrology for semiconductor manufacturing: Focus on transfer learning. - Rebecca Clain; Valeria Borodin; Michel Juge; Agnès Roussy (CASE, 2021)

Out-Of-Control Detection In Semiconductor Manufacturing using One-Class Support Vector Machines. - Ilham Rabhi; Agnès Roussy; François Pasqualini; Cyril Alegret (CASE, 2021)