Intrinsic reliability of local interconnects for N7 and beyond. - Kris Croes; Alicja Lesniewska; Chen Wu; Ivan Ciofi; Agnieszka Banczerowska; B. Briggs; S. Demuynck; Zsolt Tökei; Jürgen Bömmels; Yves Saad; W. Gao (IRPS, 2015)