A Simplified Analytical Damping Constant Model for Perforated Proof Mass Structure of MEMS Capacitive Accelerometer by Multi-Layer Metal Technology. - Kohei Shibata; Akihiro Uchiyama; Akira Onishi; Shinichi Iida; Toshifumi Konishi; Noboru Ishihara; Katsuyuki Machida; Kazuya Masu; Hiroyuki Ito (IEEE SENSORS, 2021)