MEMS acoustic emission sensor with mechanical noise rejection. - Christian Auerswald; Alexander Sorger; M. Dienel; Alexey Shaporin; Jan Mehner (SSD, 2012)

CFD analysis of viscous losses in complex microsystems. - Alexander Sorger; Markus Freitag; Alexey Shaporin; Jan Mehner (SSD, 2012)

2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride. - Katja Meinel; Marcel Melzer; Chris Stoeckel; Alexey Shaporin; Roman Forke; Sven Zimmermann; Karla Hiller; Thomas Otto; Harald Kuhn (Sensors, 2020)