1 Million Intrinsic Q-Factor Microring Resonators From PVD Aluminum Nitride on SiO2-on-Si Substrate. - Amy S. K. Tong; Wing Wai Chung; Charmaine Goh; Landobasa Y. M. Tobing; Leh Woon Lim; Yuriy A. Akimov; Zhan Jiang Quek; Aravind P. Anthur; Jia Sheng Goh; Huamao Lin; Navab Singh; Qingxin Zhang; et al. (OFC, 2024)