Integration of actuable MEMS in networked sensing systems. - Andreas Jäkel; Joerg Clobes; Qingdang Li; Volker Viereck; Hartmut Hillmer (INSS, 2010)

Micro- and nano-scaled sensors and actuators for aerospace applications. - Karin Schultz; A. Tatzel; N. Worapattrakul; Carsten Woidt; Andreas Jäkel; Volker Viereck; Hartmut Hillmer (INSS, 2012)