Regression methods for prediction of PECVD Silicon Nitride layer thickness. - Hendrik Purwins; Ahmed Nagi; Bernd Barak; Uwe Hockele; Andreas Kyek; Benjamin Lenz; Gunter Pfeifer; Kurt Weinzierl (CASE, 2011)

Production Scheduling in Complex Job Shops from an Industry 4.0 Perspective: A Review and Challenges in the Semiconductor Industry. - Bernd Waschneck; Thomas Altenmüller; Thomas Bauernhansl; Andreas Kyek (SAMI@iKNOW, 2016)

Case Study on Operator Compliance to Scheduling Decisions in Semiconductor Manufacturing. - Bernd Waschneck; Thomas Altenmüller; Thomas Bauernhansl; Andreas Kyek (CASE, 2018)

Interpretable Anomaly Detection for Knowledge Discovery in Semiconductor Manufacturing. - Mattia Carletti; Marco Maggipinto; Alessandro Beghi; Gian Antonio Susto; Natalie Gentner; Yao Yang; Andreas Kyek (WSC, 2020)

Enhancing Scalability of Virtual Metrology: A Deep Learning-Based Approach for Domain Adaptation. - Natalie Gentner; Andreas Kyek; Yao Yang; Mattia Carletti; Gian Antonio Susto (WSC, 2020)

A Scalable Deep Learning-Based Approach for Anomaly Detection in Semiconductor Manufacturing. - Simone Tedesco; Gian Antonio Susto; Natalie Gentner; Andreas Kyek; Yao Yang (WSC, 2021)