Uncertainty in microscale gas damping: Implications on dynamics of capacitive MEMS switches. - Alina A. Alexeenko; Sruti Chigullapalli; Juan Zeng; Xiaohui Guo; Andrew Kovacs; Dimitrios Peroulis (Reliab. Eng. Syst. Saf., 2011)

Fully electronic method of measuring post-release gap and gradient/residual stress of a MEMS cantilever - Andrew Kovacs (2015)