Interaction of Modulated Electron Beams With Open Periodic Structures - Andrew R. Neureuther (1966)

Simulation of microcrack effects in dissolution of positive resist exposed by X-ray lithography. - Roberto Guerrieri; Andrew R. Neureuther (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1988)

SIMPL-2: (SIMulated Profiles from the Layout-Version 2). - K. Lee; Andrew R. Neureuther (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1988)

Linking TCAD to EDA - Benefits and Issues. - Goodwin R. Chin; Walter C. Dietrich Jr.; Duane S. Boning; Alexander S. Wong; Andrew R. Neureuther; Robert W. Dutton (DAC, 1991)

Massively parallel algorithms for scattering in optical lithography. - Roberto Guerrieri; Karim H. Tadros; John K. Gamelin; Andrew R. Neureuther (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1991)

The intertool profile interchange format: a technology CAD environment approach [semiconductor technology]. - Alexander S. Wong; Andrew R. Neureuther (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1991)

A utility-based integrated system for process simulation. - Edward W. Scheckler; Alexander S. Wong; Robert K. Wang; Goodwin R. Chin; John R. Camagna; Andrew R. Neureuther; Robert W. Dutton (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1992)

An efficient volume-removal algorithm for practical three-dimensional lithography simulation with experimental verification. - Edward W. Scheckler; Nelson N. Tam; Anton K. Pfau; Andrew R. Neureuther (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1993)

Models and algorithms for three-dimensional topography simulation with SAMPLE-3D. - Edward W. Scheckler; Andrew R. Neureuther (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1994)

Algorithms for simulation of three-dimensional etching. - Kenny K. H. Toh; Andrew R. Neureuther; Edward W. Scheckler (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1994)

Massively parallel electromagnetic simulation for photolithographic applications. - Alfred Kwok Kit Wong; Roberto Guerrieri; Andrew R. Neureuther (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1995)

A Pattern Matching System for Linking TCAD and EDA. - Frank Gennari; Andrew R. Neureuther (ISQED, 2004)

Crosstalk Noise Variation Assessment and Analysis for the Worst Process Corner. - Jae-Seok Yang; Andrew R. Neureuther (ISQED, 2008)

Parameter-specific ring oscillator for process monitoring at the 45 nm node. - Lynn T.-N. Wang; Nuo Xu; Seng Oon Toh; Andrew R. Neureuther; Tsu-Jae King Liu; Borivoje Nikolic (CICC, 2010)