Challenges in the application of hybrid reluctance actuators in scanning positioning stages in vacuum with nanometer accuracy and mGauss magnetic stray field. - Anne van Lievenoogen; Adrian Toma; Upendra Ummethala (ACC, 2013)

Applications of control systems and optimization in the design of semiconductor capital equipment. - Upendra Ummethala; John J. Hench; Anne van Lievenoogen; Pradeep Subrahmanyan (ACC, 2013)