Area minimization of a three-axis separate mass capacitive accelerometer using the ThELMA process. - Ansel Briffa; Edward Gatt; Joseph Micallef; Ivan Grech; Owen Casha; Jean Marie Darmanin (EUROCON, 2013)

Design consideration for three-axis MEMS accelerometers using an asymmetric proof mass. - Jean Marie Darmanin; Ivan Grech; Joseph Micallef; Edward Gatt; Owen Casha; Ansel Briffa (EUROCON, 2013)