Fabrication of large-area 100 nm-period gratings using achromatic holographic lithography. - Anthony Yen (1991)

Holistic Patterning to Advance Semiconductor Manufacturing in the 2020s and Beyond. - Martin van den Brink; Anthony Yen; Paul van Wijnen; Michael Lercel; Boudewijn Sluijk (VLSI Technology and Circuits, 2022)