A Vertical X-ray Stepper for SOR Lithography. - Sunao Ishihara; Atsunobu Une; Munenori Kanai; Masanori Suzuki; Makoto Fukuda; Fujio Omata (J. Robotics Mechatronics, 1991)

Study of the Warp Removal Process for a Thin Substrate: Development of a Correction Processing System Using a Freezing Pin Chuck. - Kenichiro Yoshitomi; Atsunobu Une (Int. J. Autom. Technol., 2020)

Development of High-Speed Rotation Polishing System with Slurry Confinement and Friction-State Control. - Kenichiro Yoshitomi; Yoshinori Shimada; Atsunobu Une (Int. J. Autom. Technol., 2023)