Squeeze Film Effect in Surface Micromachined Nano Ultrasonic Sensor for Different Diaphragm Displacement Profiles. - Avik Ghosh Dastidar; Reshmi Maity; Ramesh Chandra Tiwari; Dejan Vidojevic; Tijana S. Kevkic; Vojkan Nikolic; Subhajit Das 001; Niladri Pratap Maity (Sensors, 2023)