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High Performance and Yield for Super Steep Retrograde Wells (SSRW) by Well Implant / Si-based Epitaxy on Advanced Technology FinFETs. - U. Rana; D. P. Brunco; S. Raman; Dina H. Triyoso; M. W. Stoker; Jeffrey B. Johnson; Luigi Pantisano; K. D. Seo; M. Zhao; A. Reznicek; R. Krishnan; B. Moser; et al. (DRC, 2019)