Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy. - P. Pungboon Pansila; Kensaku Kanomata; Bashir Ahmmad; Shigeru Kubota; Fumihiko Hirose (IEICE Trans. Electron., 2015)

Nitrogen Adsorption of Si(100) Surface by Plasma Excited Ammonia. - P. Pungboon Pansila; Kensaku Kanomata; Bashir Ahmmad; Shigeru Kubota; Fumihiko Hirose (IEICE Trans. Electron., 2015)

Room-Temperature Atomic Layer Deposition of SnO2 Using Tetramethyltin and Its Application to TFT Fabrication. - Kentaro Tokoro; Shunsuke Saito; Kensaku Kanomata; Masanori Miura; Bashir Ahmmad; Shigeru Kubota; Fumihiko Hirose (IEICE Trans. Electron., 2018)

Low-Temperature Atomic Layer Deposition of AlN Using Trimethyl Aluminum and Plasma Excited Ar Diluted Ammonia. - Kentaro Saito; Kazuki Yoshida; Masanori Miura; Kensaku Kanomata; Bashir Ahmmad; Shigeru Kubota; Fumihiko Hirose (IEICE Trans. Electron., 2022)

Low-Temperature Deposition of Yttrium Oxide on Flexible PET Films Using Time-Separated Yttrium Precursor and Oxidizer Injections. - Kentaro Saito; Kazuki Yoshida; Masanori Miura; Kensaku Kanomata; Bashir Ahmmad; Shigeru Kubota; Fumihiko Hirose (IEICE Trans. Electron., 2022)