Regression methods for prediction of PECVD Silicon Nitride layer thickness. - Hendrik Purwins; Ahmed Nagi; Bernd Barak; Uwe Hockele; Andreas Kyek; Benjamin Lenz; Gunter Pfeifer; Kurt Weinzierl (CASE, 2011)

Data Mining and Support Vector Regression Machine Learning in Semiconductor Manufacturing to Improve Virtual Metrology. - Benjamin Lenz; Bernd Barak (HICSS, 2013)

Virtual Metrology in Semiconductor Manufacturing by Means of Predictive Machine Learning Models. - Benjamin Lenz; Bernd Barak; Julia Mührwald; Carolin Leicht (ICMLA (2), 2013)