Progress on carbon nanotube BEOL interconnects. - Benjamin Uhlig; Jie Liang; Jaehyun Lee; Raphael Ramos; Abitha Dhavamani; Nicole Nagy; Jean Dijon; Hanako Okuno; Dipankar Kalita; Vihar P. Georgiev; Asen Asenov; Salvatore M. Amoroso; et al. (DATE, 2018)

BEoL Reliability, XPS and REELS Study on low-k Dielectrics to understand Breakdown Mechanisms. - Betting Wehring; Raik Hoffmann; Lukas Gerlich; Malte Czernohorsky; Benjamin Uhlig; Robert Seidel; Tobias Barchewitz; Frank Schlaphof; Lutz Meinshausen; Christoph Leyens (IRPS, 2020)

Design process interactions in shallow trench isolation chemical mechanical planarization for layout diversification and design optimization. - Conrad Guhl; Sascha Bott; I. Can Albayrak; Anne Weitzmann; Robert Krause; Joscha Kappel; Birgit Reinhold; Nan Wu; Michael Zier; Andreas Schüring; Hongwei Ma; Rico Hüselitz; et al. (ICICDT, 2021)