IF MEMS filters for mobile communication. - E. Quevy; Dimitri Galayko; Bernard Legrand; Christian Renaux; Chantal Combi; Denis Flandre; Lionel Buchaillot; Dominique Collard; B. Vigna; Andreas Kaiser (ETFA (2), 2001)

Electrostatic Actuators Operating in Liquid Environment : Suppression of Pull-in Instability and Dynamic Response - Anne-Sophie Rollier; Marc Faucher; Bernard Legrand; Dominique Collard; Lionel Buchaillot (CoRR, 2007)

Optimization of SiNX: H films deposited by PECVD for reliability of electronic, microsystems and optical applications. - Etienne Herth; Bernard Legrand; Lionel Buchaillot; Nathalie Rolland; Tuami Lasri (Microelectron. Reliab., 2010)

Optimal design of non intuitive compliant microgripper with high resolution. - Aymen Grira; Bernard Legrand; Christine Rotinat-Libersa; Estelle Mairiaux; Lionel Buchaillot (IROS, 2011)

12 years of resonator: From telephone to atomic force microscopy. - Lionel Buchaillot; Bernard Legrand; Marc Faucher; Benjamin Walter; E. Algre; Zhuang Xiong (MHS, 2011)

Piezoresistive Ring-Shaped AFM Sensors with Pico-Newton Force Resolution. - Zhuang Xiong; Benjamin Walter; Estelle Mairiaux; Marc Faucher; Lionel Buchaillot; Bernard Legrand (Int. J. Intell. Mechatronics Robotics, 2013)

A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection. - Zhuang Xiong; Estelle Mairiaux; Benjamin Walter; Marc Faucher; Lionel Buchaillot; Bernard Legrand (Sensors, 2014)

Low Latency Demodulation for High-Frequency Atomic Force Microscopy Probes. - Denis Lagrange; Nicolas Mauran; Lucien Schwab; Bernard Legrand (IEEE Trans. Control. Syst. Technol., 2021)