On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies. - Usama Zaghloul; George J. Papaioannou; Bharat Bhushan 002; Fabio Coccetti; Patrick Pons; Robert Plana (Microelectron. Reliab., 2011)

Erratum to "On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies" [MR 51/9-11 (2011) 1810-1818]. - Usama Zaghloul; George J. Papaioannou; Bharat Bhushan 002; Fabio Coccetti; Patrick Pons; Robert Plana (Microelectron. Reliab., 2011)