Virtual metrology algorithm for TFT-LCD manufacutring process. - Bi-Qi Sheng; Tian-Hong Pan (FSKD, 2011)

A Virtual Metrology System for Predicting End-of-Line Electrical Properties Using a MANCOVA Model With Tools Clustering. - Tian-Hong Pan; Bi-Qi Sheng; David Shan-Hill Wong; Shi-Shang Jang (IEEE Trans. Ind. Informatics, 2011)