Stacking ensemble learning based material removal rate prediction model for CMP process of semiconductor wafer. - Zhilong Song; Wenhong Zhao; Xiao Zhang; Mingfeng Ke; Wei Fang; Binghai Lyu (Artif. Intell. Eng. Des. Anal. Manuf., 2024)

Research on Wafer CMP Temperature Online Detection Compensation Algorithm Based on GA-BP Improved Neural Network. - Binjie Li; Kuan Shen; Zhilong Song; Binghai Lyu; Wenhong Zhao (IEEE Access, 2025)