Modeling and Optimization of Multi-terraced-Plate Electrostatic Actuator. - Biyun Ling; Minli Cai; Biqing Zhou; Xiaoyue Wang; Yuhu Xia; Yuwei Han; Yaming Wu (IEEE SENSORS, 2024)

Influence of Scallops in Deep Reactive Ion Etching on Vertical Comb-Based Sensors/Actuators. - Yuhu Xia; Biyun Ling; Bo Chen; Xiaoyue Wang; Biqing Zhou; Yaming Wu (IEEE SENSORS, 2024)