An electrostatically-driven and capacitively-sensed differential lateral resonant pressure microsensor. - Bo Xie 006; Hailong Jiao; Junbo Wang 002; Deyong Chen; Jian Chen 012 (NEMS, 2013)

A Lateral Differential Resonant Pressure Microsensor Based on SOI-Glass Wafer-Level Vacuum Packaging. - Bo Xie 006; Yonghao Xing; Yanshuang Wang; Jian Chen 012; Deyong Chen; Junbo Wang 002 (Sensors, 2015)

Reduction of the temperature sensitivity of anodic bonded resonant pressure micro sensors. - Yulan Lu; Bo Xie 006; Lin Zhu; Qiuxu Wei; Chaochao He; Chao Xiang; Junbo Wang 002; Deyong Chen; Jian Chen 012 (NEMS, 2017)

A Resonant Pressure Micro Sensor with a Stress Isolation Layer. - Yulan Lu; Bo Xie 006; Qiuxu Wei; Yadong Li; Xiaoqing Shi; Chao Xiang; Deyong Chen; Junbo Wang 002; Jian Chen 012 (IEEE SENSORS, 2018)

A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection. - Xiaoqing Shi; Yulan Lu; Bo Xie 006; Yadong Li; Junbo Wang 002; Deyong Chen; Jian Chen 012 (Sensors, 2018)

A High-sensitivity, Small-size Resonant Pressure Microsensor Based on Optimized Resonator-diaphragm Structure. - Yulan Lu; Sen Zhang; Yadong Li; Bo Xie 006; Deyong Chen; Junbo Wang 002; Jian Chen 012 (NEMS, 2019)

A Resonant Pressure Microsensor with the Measurement Range of 1 MPa Based on Sensitivities Balanced Dual Resonators. - Yulan Lu; Pengcheng Yan; Chao Xiang; Deyong Chen; Junbo Wang 002; Bo Xie 006; Jian Chen 012 (Sensors, 2019)

A Piezoresistive Pressure Microsensor Based on Simplified Fabrication Processes. - Qinggang Meng; Yulan Lu; Junbo Wang 002; Deyong Chen; Jian Chen 012; Bo Xie 006 (NEMS, 2021)

A Resonant High Pressure Sensor Based on Dual Cavities Design. - Jie Yu; Yulan Lu; Deyong Chen; Junbo Wang 002; Bo Xie 006 (NEMS, 2021)

A Resonant Pressure Microsensor Optimized by DETF Resonators. - Xingyu Li; Bo Xie 006; Yulan Lu; Junbo Wang 002; Deyong Chen; Jian Chen 012; Nan Li; Xiaoye Huo (SENSORS, 2023)

A Wide Temperature Range Weakly Coupled Resonant Micro-pressure Sensor. - Jiaxin Qin; Deyong Chen; Bo Xie 006; Junbo Wang 002; Yulan Lu; Bowen Wang; Zhaoyang Zhai; Jian Chen 012; Nan Li; Xiaoye Huo (SENSORS, 2023)

Design and Characterization of Resonant Pressure Microsensor Based on Parametric Pump. - Wenliang Xia; Bo Xie 006; Yulan Lu; Junbo Wang 002; Deyong Chen; Jian Chen 012; Nan Li; Xiaoye Huo (SENSORS, 2023)

A Novel High-Pressure Resonant Microsensor Based on Volume Compressed Sensing. - Zongze Yu; Pan Qian; Yulan Lu; Deyong Chen; Junbo Wang 002; Bo Xie 006; Nan Li; Xiaoye Huo (SENSORS, 2023)

A Quadrature Phase-Locked Loop Based Digital Closed-Loop System for MEMS Resonant Sensors. - Mengyang Zhou; Jiahui Yao; Yulan Lu; Bo Xie 006; Junbo Wang 002; Deyong Chen; Jian Chen 012; Xiaoye Huo; Nan Li (SENSORS, 2023)

A Resonant MEMS Pressure Sensor Utilizing Higher-Order Mode Oscillation. - Wenliang Xia; Bo Xie 006; Yulan Lu; Junbo Wang 002; Deyong Chen; Jian Chen 012 (IEEE SENSORS, 2024)

High-Pressure Silicon Resonant Microsensor Based on Microbeam Arrays. - Pengxiang Ye; Zongze Yu; Pan Qian; Deyong Chen; Junbo Wang 002; Bo Xie 006; Yulan Lu (IEEE SENSORS, 2024)