Automated Lithography Resolution Enhancement with Deep Learning Enabled Layout Modification during Physical Design Stage. - Zixi Liu; Yibo Lin; Xiaojing Su; Xiaohuan Ling; Xin Hong; Bojie Ma; Yajuan Su; Yayi Wei (ACM Great Lakes Symposium on VLSI, 2024)

An Automatic Insertion Scheme of Extra Via for DSA-MP Hybrid Lithography. - Yuqin Wang; Cheng Guo; Xiaojing Su; Xin Hong; Zixi Liu; Xiaohuan Ling; Bojie Ma; Pengyu Ren; Yujie Jiang; Yajuan Su; Yayi Wei (ACM Great Lakes Symposium on VLSI, 2024)