A defect characterization technique for the sidewall surface of Nano-ridge and Nanowire based Logic and RF technologies. - Abhitosh Vais; Brent Hsu; Olga Syshchyk; Hao Yu; AliReza Alian; Yves Mols; Komal Vondkar Kodandarama; Bernardette Kunert; Niamh Waldron; Eddy Simoen; Nadine Collaert (IRPS, 2021)