Deep-amorphization and solid-phase epitaxial regrowth processes for hybrid orientation technologies in SOI MOSFETs with thin body. - Akiko Ohata; Young-Ho Bae; Sorin Cristoloveanu; Thomas Signamarcheix; J. Widiez; Bruno Ghyselen; Olivier Faynot; Laurent Clavelier (Microelectron. Reliab., 2012)