Structure-based equivalent circuit modeling of a capacitive-type MEMS microphone. - Jaewoo Lee; C. H. Je; Woo-Seok Yang; Jongdae Kim (ISCIT, 2012)

A bottom-inlet type MEMS acoustic sensor with wheel-shaped back-plate anchor. - Jaewoo Lee; C. H. Je; Woo-Seok Yang; Jongdae Kim (EUROCON, 2013)