Neural network based uniformity profile control of linear chemical-mechanical planarization. - Jingang Yi; Ye Sheng; C. Shan Xu (CDC, 2003)

Image based compensation for thickness variation in microscopy section series. - Philipp Hanslovsky; John A. Bogovic; C. Shan Xu; Kenneth J. Hayworth; Zhiyuan Lu; Harald F. Hess; Stephan Saalfeld (CoRR, 2015)