Modularized low temperature LNO/PZT/LNO ferroelectric capacitor-over-interconnect (COI) FeRAM for advanced SOC (ASOC) application. - S. L. Lung; Dennis Lin; S. S. Chen; Gary Weng; C. L. Liu 001; S. C. Lai; C. W. Tsai; T. B. Wu; Rich Liu (CICC, 2002)