Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits. - Niels Quack; Hamed Sattari; Alain Y. Takabayashi; Yu Zhang; Pierre Edinger; Carlos Errando-Herranz; Kristinn B. Gylfason; Xiaojing Wang; Frank Niklaus; Moises A. Jezzini; How Yuan Hwang; Peter O'Brien; et al. (OFC, 2019)

Dataset for "Review of MEMS for photonic integrated circuits": table for reported key figures. - Carlos Errando-Herranz; Alain Yuji Takabayashi; Pierre Edinger; Hamed Sattari; Kristinn B. Gylfason; Niels Quack (IEEE DataPort, 2019)