Effective work function engineering by sacrificial lanthanum diffusion on HfON-based 14 nm NFET devices. - Carlos Suarez-Segovia; Charles Leroux; Florian Domengie; Karen Dabertrand; Vincent Joseph; Giovanni Romano 003; Pierre Caubet; Stephane Zoll; Olivier Weber; Gérard Ghibaudo; Gilles Reimbold; Michel Haond (ESSDERC, 2015)