Anodically Bonded Photoacoustic Transducer: An Approach towards Wafer-Level Optical Gas Sensors. - Simon Gassner; Rainer Schaller; Matthias Eberl; Carsten von Koblinski; Simon Essing; Mohammadamir Ghaderi; Katrin Schmitt; Jürgen Wöllenstein (Sensors, 2022)