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Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in the Semiconductor Industry. - Umberto Amato; Anestis Antoniadis; Italia De Feis; Domenico Fazio; Caterina Genua; Irène Gijbels; Donatella Granata; Antonino La Magna; Daniele Pagano; Gabriele Tochino; Patrizia Vasquez (Sensors, 2023)