Three-Dimensional Nano Measurement System Based on Resonant Trigger Probe. - Qiang-Xian Huang; Jian Xu; Xianzhi Qin; Liansheng Zhang; Rongjun Cheng; Hongli Li; Chaoqun Wang 010; Rui-Jun Li (IEEE Trans. Instrum. Meas., 2024)

Microstructure Edge Measurement With Nanometer Lateral Resolution Based on Astigmatism. - Jian Xu; Qiang-Xian Huang; Zhiqin Wang; Rongjun Cheng; Liansheng Zhang; Hongli Li; Chaoqun Wang 010; Ruijun Li (IEEE Trans. Instrum. Meas., 2025)