Wafer-level fabrication of vacuum-gap Fabry-Pérot resonators with quality factors exceeding one billion. - Naijun Jin; Yifan Liu; Dahyeon Lee; Haotian Cheng; Charles A. McLemore; Samuel Halladay; Yizhi Luo; David Mason; Scott A. Diddams; Franklyn Quinlan; Peter T. Rakich (OFC, 2024)