3D thermal modeling of a plasma assisted chemical vapor deposition process. - Sébastien Rouquette; Laurent Autrique; Charles Chaussavoine; Laurent Thomas (ACC, 2002)

A method for the identification of heat transfers on the surface of a material: Application to a plasma assisted chemical vapour deposition process. - Sébastien Rouquette; Laurent Autrique; Charles Chaussavoine; Laurent Thomas (ECC, 2003)