A MEMS Type Damping Viscous Vacuum Gauge For High Vacuum Measurement. - Chengxiang Wang 005; Yulie Wu; Zhanqiang Hou; Yunbin Kuang; Yongmeng Zhang; Xuezhong Wu; Dingbang Xiao (IEEE SENSORS, 2020)

Frequency Output, A multi-modes Vacuum Gauge with Highly Output linearity Based on Electrostatic Nonlinearity. - Chengxiang Wang 005; Yunbin Kuang; Yulie Wu; Zhanqiang Hou; Yongmeng Zhang; Xuezhong Wu; Dingbang Xiao (NEMS, 2021)