Efficient Proximity Effect Correction Using Fast Multipole Method With Unequally Spaced Grid for Electron Beam Lithography. - Wenze Yao; Haojie Zhao; Chengyang Hou; Wei Liu; Hongcheng Xu; Xin Zhang 055; Jing Xiao; Jie Liu (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 2023)