Multi-agent Reinforcement Learning Approach for Scheduling Cluster Tools with Condition Based Chamber Cleaning Operations. - Cheolhui Hong; Tae-Eog Lee (ICMLA, 2018)

Modeling, Simulation and Supervisory Control of Semiconductor Manufacturing Cluster Tools with an Equipment Front-End Module. - Cheolhui Hong; Tae-Eog Lee (CASE, 2020)