Implementation of the CMOS MEMS Condenser Microphone with Corrugated Metal Diaphragm and Silicon Back-Plate. - Chien-Hsin Huang; Chien-Hsing Lee; Tsung-Min Hsieh; Li-Chi Tsao; Shaoyi Wu; Jhyy-Cheng Liou; Mingyi Wang; Li-Che Chen; Ming-Chuen Yip; Weileun Fang (Sensors, 2011)