1024 3D-Stacked Monolithic NEMS Array with 375μm20.5mW 0.28ppm Frequency Deviation Pixel-level Readout for Zeptogram Gravimetric Sensing. - Gérard Billiot; Paul Mattei; Bogdan Vysotskyi; Adrien Reynaud; Louis Hutin; Christophe Plantier; Emmanuel Rolland; Marc Gely; Giulia Usai; Claude Tabone; Gaël Pillonnet; Stéphanie Robinet; et al. (ISSCC, 2022)