Improved electrical properties using SrTiO3/Y2O3 bilayer dielectrics for MIM capacitor applications. - Maurice Kahn; Christophe Vallée; Emmanuel Defay; Catherine Dubourdieu; Marceline Bonvalot; Serge Blonkowski; Jean-Raoul Plaussu; Pierre Garrec; Thierry Baron (Microelectron. Reliab., 2007)