Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities. - Thomas F. Edgar; Stephanie W. Butler; W. Jarrett Campbell; Carlos Pfeiffer; Christopher A. Bode; Sung Bo Hwang; K. S. Balakrishnan; Juergen Hahn (Autom., 2000)

Run-to-run control and state estimation in high-mix semiconductor manufacturing. - Christopher A. Bode; Jin Wang 030; Q. Peter He; Thomas F. Edgar (Annu. Rev. Control., 2007)