Spherical aberration correction in aplanatic solid immersion lens imaging using a MEMS deformable mirror. - Yang Lu 004; Euan Ramsay; Christopher R. Stockbridge; Abdulkadir Yurt; F. Hakan Köklü; Thomas G. Bifano; M. Selim Ünlü; Bennett B. Goldberg (Microelectron. Reliab., 2012)